Semiconductor pumps from IWAKI
Individual configurations according to customer requirements
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Pneumatically operated bellows pumps FA
Contamination-free construction
All wetted parts are made of fluoroplastic, with excellent resistance to heat and aggressive chemicals. Sharp corrosive liquids are safely pumped with reduced particle emission.
Drive Sensor System
The actuator sensor system opens/closes the magnet by means of an end position sensor. Reliable operation as well as stable behaviour even with a low number of strokes are given.
For single-wafer processing, the FA-2E, a ""side version"" for small flow rates, equipped with a spray system, is available. With the FA-40VEW, a vertical version for large flow rates, 200/300 mm wafers can be cleaned.
Excellent resistance to high pressures is provided by the thick H-shaped bellows (FA-40VEW) and guarantees a long service life with continuous operation.
If a special controller is connected, monitoring and controlling the flow rate is very easy.
Specifications (50 Hz)
| Max. delivery rate: | 2.400 l/h |
| Max. delivery pressure: | 4 bar |
| Max. Stroke frequency: | 150 spm |
| Main materials: | PTFE / PFA |
| Temperature range: | 5 to 100°C |
High Precision Chemical Replenishment Pumps CFD
High Precision Chemical Replenishment Pumps CFD
These CFD pumps are used in the wet cleaning process in semiconductor manufacturing. Chemicals with high vapour pressure such as ammonia and hydrogen peroxide can also be pumped.
By using fluoroplastic, high purity and very good chemical resistance are achieved. The adjustment of the stroke length as well as the number of strokes enables the exact adjustment of the conveying capacity. Particle formation is prevented by the PFA hose connections.
Specifications (50 Hz)
| Max. delivery rate: | 8 ml/Hub |
| Max. delivery pressure: | 0,5 bar |
| Max. Stroke frequency: | 30 spm |
| Main materials: | PTFE / PFA |
| Temperature range: | 20 to 60°C |
Pneumatically operated bellows pumps FW/-H
Contamination-free construction
All wetted parts are made of fluoroplastic, with excellent resistance to heat and aggressive chemicals. Sharp corrosive liquids are safely conveyed with reduced particle emission.Drive Sensor System
The actuator sensor system opens/closes the magnet by means of an end position sensor. Reliable operation as well as stable behaviour even with a low number of strokes are given.
The adoption of thick bellows allows pressures up to 4.5 bar. In addition, the bellows last 3 or 4 times longer than a diaphragm. FW Series pumps are used in cleaning, CPM and chemical circulation processes.
The connections for suction and discharge side are made of PFA. The integrated design prevents the accumulation of particles. If a special controller is connected, monitoring and controlling the flow rate is very easy.
Specifications (50 Hz)
| Max. delivery rate: | 4.800 l/h |
| Max. delivery pressure: | 4,5 bar |
| Max. stroke frequency | 120 spm |
| Main materials: | PTFE / PFA |
| Temperature range: | 10 to 180°C |
Pneumatically operated bellows pumps FS
High-speed strokes
The number of strokes varies according to type. As a result of the reduction in size, weight and cost, the number of strokes has been increased to 240 spm and the pulsation reduced.Contamination-free construction
All wetted parts are made of fluoroplastic. The pump has been designed so that there are no unprotected metal parts. The exterior is also covered with fluoroplastic. The use of a piston seal (patent pending) has the effect of considerably reducing particle emission.
Wide temperature range/high pressure conveying
Media with a temperature range of 5 to 180°C at a pressure of up to 5 bar can be pumped. The pump can be used for cleaning, CMP or chemical circulation processes.
Easy maintenance
The end position sensor can be replaced without dismantling the pump and regular retightening of the retaining screws is also unnecessary, thus reducing downtime
Drive Sensor System
The actuator sensor system opens/closes the magnet by means of an end position sensor. Therefore the output can be easily controlled or regulated if different controllers are connected.
Specifications (50 Hz)
| Max. delivery rate: | 6.000 l/h |
| Max. delivery pressure: | 5 bar |
| Max. Stroke frequency: | 240 spm |
| Main materials: | PTFE / PFA |
| Temperature range: | 5 to 180°C |
Pumps as made for you, individually according to your needs.
Our staff will be happy to advise you and make you an offer to come.